Measurement of the internal geometry of MEMS structures :: Wenjuan Sun :: National Physical Laboratory 2010 :: OBNB, the Open British National Bibliography

Publication Data

Title Measurement of the internal geometry of MEMS structures
Author Wenjuan Sun
Contributors R. K. Leach, National Physical Laboratory
Publisher National Physical Laboratory
Publication date 2010
Publication location Teddington
Language English

Descriptive Notes

Title from front page.

Topics

Microelectromechanical systems :: Measurement

Catalogue Data

OBNB ID GBB0A9636
ISBN 10 n/a
ISBN 13 n/a
Type BibliographicResource, Book
Dewey Classification 621.381

ISBD

P1053 32 p.
P1042 Includes bibliographical references.

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Measurement of the internal geometry of MEMS structures by Wenjuan Sun. Published by National Physical Laboratory in 2010. Publication and catalogue information, links to buy online and reader comments.